Invention Grant
- Patent Title: Selective recess
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Application No.: US16189804Application Date: 2018-11-13
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Publication No.: US10658313B2Publication Date: 2020-05-19
- Inventor: Javier A. Delacruz , Rajesh Katkar , Shaowu Huang , Gaius Gillman Fountain, Jr. , Liang Wang , Laura Wills Mirkarimi
- Applicant: Invensas Bonding Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768 ; H01L23/48 ; H01L25/065 ; H01L25/00

Abstract:
Representative implementations of techniques and devices are used to remedy or mitigate the effects of damaged interconnect pads of bonded substrates. A recess of predetermined size and shape is formed in the surface of a second substrate of the bonded substrates, at a location that is aligned with the damaged interconnect pad on the first substrate. The recess encloses the damage or surface variance of the pad, when the first and second substrates are bonded.
Public/Granted literature
- US20190181107A1 SELECTIVE RECESS Public/Granted day:2019-06-13
Information query
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