- Patent Title: Method for producing a pillar-shaped semiconductor memory device
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Application No.: US16225146Application Date: 2018-12-19
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Publication No.: US10658371B2Publication Date: 2020-05-19
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/225
- IPC: H01L21/225 ; H01L27/11 ; H01L29/786 ; H01L21/324 ; H01L21/8238 ; H01L23/522 ; H01L23/528 ; H01L29/08 ; H01L29/10 ; H01L29/423 ; H01L29/78 ; H01L29/66

Abstract:
A method for producing a pillar-shaped semiconductor device includes, forming a first semiconductor pillar, a second semiconductor pillar, and a third semiconductor pillar on a substrate. A gate insulating layer and gate conductor layer are formed surrounding each of the pillars and impurity regions are formed in each pillar. The gate conductor layer is selectively processed to form gate conductors around the pillars and to interconnect the gate conductors.
Public/Granted literature
- US20190123053A1 METHOD FOR PRODUCING A PILLAR-SHAPED SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-04-25
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