Method for producing a pillar-shaped semiconductor memory device
Abstract:
A method for producing a pillar-shaped semiconductor device includes, forming a first semiconductor pillar, a second semiconductor pillar, and a third semiconductor pillar on a substrate. A gate insulating layer and gate conductor layer are formed surrounding each of the pillars and impurity regions are formed in each pillar. The gate conductor layer is selectively processed to form gate conductors around the pillars and to interconnect the gate conductors.
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