Invention Grant
- Patent Title: Virtual drain for decreased harmonic generation in fully depleted SOI (FDSOI) RF switches
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Application No.: US16031407Application Date: 2018-07-10
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Publication No.: US10658390B2Publication Date: 2020-05-19
- Inventor: Edward J. Nowak , Richard F. Taylor , Tamilmani Ethirajan
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/10 ; H03K17/687 ; H01L21/762 ; H03K17/693 ; H01L21/84

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to virtual drains for decreased harmonic generation in fully depleted SOI (FDSOI) RF switches and methods of manufacture. The structure includes one or more active devices on a semiconductor on insulator material which is on top of a substrate; and a virtual drain region composed of a well region within the substrate and spaced apart from an active region of the one or more devices, the virtual drain region configured to be biased to collect electrons which would accumulate in the substrate.
Public/Granted literature
- US20200020721A1 VIRTUAL DRAIN FOR DECREASED HARMONIC GENERATION IN FULLY DEPLETED SOI (FDSOI) RF SWITCHES Public/Granted day:2020-01-16
Information query
IPC分类: