Invention Grant
- Patent Title: Memory device
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Application No.: US16124114Application Date: 2018-09-06
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Publication No.: US10658480B2Publication Date: 2020-05-19
- Inventor: Ryuji Ohba
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@43275546
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L29/51 ; H01L27/11582 ; H01L27/11556 ; H01L27/11514 ; H01L27/11578 ; H01L27/11551

Abstract:
A memory device includes plural electrode layers stacked in a first direction, a semiconductor layer interacting with the plural electrode layers and extending in the first direction, a first insulating film provided between the semiconductor layer and at least one electrode layer and extending along the semiconductor layer in the first direction, and a charge trapping film provided between the electrode layer and the first insulating film. The memory device further includes a second insulating film provided between the charge trapping film and the first insulating film and in contact with the first insulating film. In a flat band state, the charge trapping film has a first trap level located at a level deeper than a conduction band of the semiconductor layer and the second insulating film has a second trap level that is closer to the conduction band of the semiconductor layer than the first trap level.
Public/Granted literature
- US20190296118A1 MEMORY DEVICE Public/Granted day:2019-09-26
Information query
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