Invention Grant

Memory device
Abstract:
A memory device includes plural electrode layers stacked in a first direction, a semiconductor layer interacting with the plural electrode layers and extending in the first direction, a first insulating film provided between the semiconductor layer and at least one electrode layer and extending along the semiconductor layer in the first direction, and a charge trapping film provided between the electrode layer and the first insulating film. The memory device further includes a second insulating film provided between the charge trapping film and the first insulating film and in contact with the first insulating film. In a flat band state, the charge trapping film has a first trap level located at a level deeper than a conduction band of the semiconductor layer and the second insulating film has a second trap level that is closer to the conduction band of the semiconductor layer than the first trap level.
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