Invention Grant
- Patent Title: Semiconductor device and manufacturing method therefor
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Application No.: US16044818Application Date: 2018-07-25
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Publication No.: US10658511B2Publication Date: 2020-05-19
- Inventor: Yong Li
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing (Shanghai) International Corporation,Semiconductor Manufacturing (Beijing) International Corporation
- Current Assignee: Semiconductor Manufacturing (Shanghai) International Corporation,Semiconductor Manufacturing (Beijing) International Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Brinks Gilson & Lione
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@415bb665
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L23/532 ; H01L29/66 ; H01L21/28 ; H01L21/477 ; H01L21/8238 ; H01L21/321 ; H01L27/092

Abstract:
The present disclosure is directed to a semiconductor device and a manufacturing method therefor. In one implementations, a method includes: providing a semiconductor structure, where the semiconductor structure includes: a substrate, and a first fin and a second fin spaced on the substrate; depositing a first interlayer dielectric layer on the semiconductor structure; performing first partial etching on the first interlayer dielectric layer to expose a top of the first fin; after the top of the first fin is exposed, removing a part of the first fin to form a first groove; epitaxially growing a first electrode in the first groove; performing second partial etching on the first interlayer dielectric layer to expose a top of the second fin; after the top of the second fin is exposed, removing a part of the second fin to form a second groove, where the second groove is separated from the first groove; and epitaxially growing a second electrode in the second groove. The present disclosure addresses the problem of bridging of electrode epitaxial bodies of different devices in the prior art.
Public/Granted literature
- US20190035925A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2019-01-31
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