Invention Grant
- Patent Title: Multi-well selenium device and method for fabrication thereof
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Application No.: US16068563Application Date: 2017-01-09
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Publication No.: US10658530B2Publication Date: 2020-05-19
- Inventor: Amirhossein Goldan , Wei Zhao
- Applicant: The Research Foundation for The State University of New York
- Applicant Address: US NY Albany
- Assignee: The Research Foundation for The State University of New York
- Current Assignee: The Research Foundation for The State University of New York
- Current Assignee Address: US NY Albany
- Agency: The Farrell Law Firm, P.C.
- Agent John F. Gallagher, III
- International Application: PCT/US2017/012712 WO 20170109
- International Announcement: WO2017/120582 WO 20170713
- Main IPC: H01L31/0272
- IPC: H01L31/0272 ; H01L31/107 ; H01L27/146 ; H01L31/0352 ; H01L31/0216 ; H01L31/0224 ; H01L31/0376 ; H01L31/105

Abstract:
Provided is a field shaping multi-well detector and method of fabrication thereof. The detector is configured by depositing a pixel electrode on a substrate, depositing a first dielectric layer, depositing a first conductive grid electrode layer on the first dielectric layer, depositing a second dielectric layer on the first conductive grid electrode layer, depositing a second conductive grid electrode layer on the second dielectric layer, depositing a third dielectric layer on the second conductive grid electrode layer, depositing an etch mask on the third dielectric layer. Two pillars are formed by etching the third dielectric layer, the second conductive grid electrode layer, the second dielectric layer, the first conductive grid electrode layer, and the first dielectric layer. A well between the two pillars is formed by etching to the pixel electrode, without etching the pixel electrode, and the well is filled with a-Se.
Public/Granted literature
- US20190006533A1 MULTI-WELL SELENIUM DEVICE AND METHOD FOR FABRICATION THEREOF Public/Granted day:2019-01-03
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