- Patent Title: Semiconductor optical device and method of manufacturing the same
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Application No.: US16080395Application Date: 2017-01-30
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Publication No.: US10658543B2Publication Date: 2020-05-19
- Inventor: Norio Tasaki
- Applicant: DOWA Electronics Materials Co., Ltd.
- Applicant Address: JP Chiyoda-ku, Tokyo
- Assignee: DOWA Electronics Materials Co., Ltd.
- Current Assignee: DOWA Electronics Materials Co., Ltd.
- Current Assignee Address: JP Chiyoda-ku, Tokyo
- Agency: Kenja IP Law PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5d5885c5
- International Application: PCT/JP2017/003190 WO 20170130
- International Announcement: WO2017/154404 WO 20170914
- Main IPC: H01L33/60
- IPC: H01L33/60 ; H01L33/38 ; H01L33/58 ; H01L33/62 ; H01L33/40 ; H01L31/10

Abstract:
Provided is a semiconductor optical device with light extraction efficiency or light collecting efficiency higher than that of conventional devices and with a reduced peeling ratio of a wiring electrode portion, and a method of manufacturing the same. In the semiconductor optical, a wiring electrode portion 120 is provided on a surface of a semiconductor layer 110 that serves as a light emitting surface or a light receiving surface, the line width W1 of the wiring electrode portion 120 is 2 μm or more and 5 μm or less, the wiring electrode portion 120 has a metal layer 121 on the semiconductor layer 110 and a conductive hard film 122 on the metal layer 121, and the conductive hard film 122 is harder than the metal layer 121.
Public/Granted literature
- US20190273182A1 SEMICONDUCTOR OPTICAL DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-09-05
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