Invention Grant
- Patent Title: Method of fabricating flexible substrate having laminated material made of silicon oxide and amorphous silicon
-
Application No.: US15579423Application Date: 2017-11-21
-
Publication No.: US10658600B2Publication Date: 2020-05-19
- Inventor: Bo Liang
- Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Hemisphere Law, PLLC
- Agent Zhigang Ma
- International Application: PCT/CN2017/112132 WO 20171121
- International Announcement: WO2019/095406 WO 20190523
- Main IPC: C23C16/40
- IPC: C23C16/40 ; H01L51/00 ; B32B9/04 ; H01L51/50 ; C23C16/513

Abstract:
A fabricating method of a flexible substrate is provided, including: step 1: fabricating a first flexible base; step 2: fabricating at least one layer of a laminated material made of silicon oxide and amorphous silicon on the first flexible base; step 3: performing a dehydrogenation treatment to the laminated material; and step 4: fabricating a second flexible base on the laminated material to obtain a flexible substrate. Compared with the prior art, by disposing two layers of flexible bases and a laminated material between the flexible bases, the stability of multiple bending can be improved; by performing a dehydrogenation treatment of the laminated material, the defects of the flexible substrate in the back-end process can be reduced.
Public/Granted literature
- US20190229281A1 FLEXIBLE SUBSTRATE AND FABRICATING METHOD THEREOF Public/Granted day:2019-07-25
Information query
IPC分类: