Invention Grant
- Patent Title: Resonator and resonance device
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Application No.: US15723344Application Date: 2017-10-03
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Publication No.: US10659004B2Publication Date: 2020-05-19
- Inventor: Yuichi Goto , Wakana Hirota
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H03H9/17 ; H03H9/02 ; H03H3/007 ; H03H9/10 ; H03H9/05 ; H03H9/24 ; H03H9/15

Abstract:
A resonance device is provided having a resonator with opposing upper and lower lids. The resonator includes a base, and multiple vibration arms that are connected to a front end of the base so as to extend away from the base. Moreover, a frame surrounds a periphery of the base portion and the vibration arms and one or more holding arms connect the base to the frame. The base, the vibration arms, and the holding arm include a substrate and a temperature characteristics correction layer laminated on the substrate and having a material with a coefficient of thermal expansion different from that of the substrate. The base, the vibration arms, and the holding arm are formed integrally with the substrate and the temperature characteristics correction layer.
Public/Granted literature
- US20180048286A1 RESONATOR AND RESONANCE DEVICE Public/Granted day:2018-02-15
Information query
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