An alignment apparatus performs alignment of a substrate is provided. The apparatus comprises a stage that moves while holding a substrate, an imaging device that captures an image of a mark on the substrate, and a processor that obtains a position of the mark based on the image of the mark. The imaging device includes an image sensor and a storage device that stores image data obtained by the image sensor. The imaging device performs next image capturing after the image sensor performs accumulation of charge and transfer of image data to the storage device is completed. The apparatus moves the stage for next image capturing concurrently with transfer of the image data to the storage device when capturing an image of the mark using the imaging device at a plurality of positions while moving the stage.