Invention Grant
- Patent Title: Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface
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Application No.: US14944066Application Date: 2015-11-17
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Publication No.: US10661411B2Publication Date: 2020-05-26
- Inventor: Ryuichi Kosuge , Hiroshi Sotozaki , Takeshi Kodera , Ryo Hasegawa
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27d6e37
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B37/34 ; B23K31/02 ; B23K37/08 ; B23K33/00 ; B23K101/20

Abstract:
There is disclosed a polishing-surface cleaning apparatus to which a polishing liquid, such as slurry, is less likely to be attached. The polishing-surface cleaning apparatus includes an arm having a fluid passage, a nozzle communicating with the fluid passage, and a weld material securing the nozzle to the arm. The weld material fills a gap between a bottom surface of the arm and an edge of a front-end surface of the nozzle.
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