Invention Grant
- Patent Title: Plasma processing apparatus, abnormality determination method, and microwave generator
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Application No.: US14588114Application Date: 2014-12-31
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Publication No.: US10662531B2Publication Date: 2020-05-26
- Inventor: Kazushi Kaneko , Yunosuke Hashimoto , Yohei Ishida
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@504d4eff
- Main IPC: C23C16/511
- IPC: C23C16/511 ; G01R23/02 ; H01J37/32 ; H03L7/26

Abstract:
Disclosed is a plasma processing apparatus including a processing container, a plasma generation mechanism, a regulation unit, a detection unit, and a determination unit. The plasma generation mechanism includes a microwave oscillator, and generates plasma within the processing container using microwaves oscillated by the microwave oscillator. The regulation unit regulates an oscillation frequency, which corresponds to a frequency of the microwaves oscillated by the microwave oscillator, to a predetermined frequency. The detection unit detects the oscillation frequency regulated to the predetermined frequency by the regulation unit. The determination unit determines the success/failure of regulation of the oscillation frequency by the regulation unit, using the oscillation frequency detected by the detection unit, or using a parameter which is changed depending on a difference between the oscillation frequency and the predetermined frequency.
Public/Granted literature
- US20150194292A1 PLASMA PROCESSING APPARATUS, ABNORMALITY DETERMINATION METHOD, AND MICROWAVE GENERATOR Public/Granted day:2015-07-09
Information query
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