Invention Grant
- Patent Title: Shape measuring apparatus and shape measuring method using matched frequency measuring light
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Application No.: US16274345Application Date: 2019-02-13
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Publication No.: US10663288B2Publication Date: 2020-05-26
- Inventor: Kazuhiko Tahara
- Applicant: KOBELCO RESEARCH INSTITUTE, INC.
- Applicant Address: JP Kobe-shi
- Assignee: KOBELCO RESEARCH INSTITUTE, INC.
- Current Assignee: KOBELCO RESEARCH INSTITUTE, INC.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ccf3caf
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B9/02 ; H04B10/64 ; G02B27/28 ; G01B11/24

Abstract:
A shape measuring apparatus of the present invention measures a variation in a thickness of an object to be measured WA based on an A surface reference interference light and an A surface measuring interference light obtained by performing optical heterodyne interference on a first A surface measuring light and a second A surface measuring light and a B surface reference interference light and a B surface measuring interference light obtained by performing the optical heterodyne interference on a first B surface measuring light and a second B surface measuring light. When the optical heterodyne interference is performed, the shape measuring apparatus makes the first A surface measuring light and the second B surface measuring light equal in frequency and makes the first B surface measuring light and the second A surface measuring light equal in frequency.
Public/Granted literature
- US20190293407A1 SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD Public/Granted day:2019-09-26
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