Sensor assembly for a resistance thermometer, resistance thermometer and method of producing a sensor assembly
Abstract:
A sensor assembly for a resistance thermometer is disclosed. The sensor assembly comprises a substrate, a measuring structure disposed on the substrate, and a cover layer disposed on the measuring structure. The cover layer has a plurality of first layers formed of a first material and a plurality of second layers formed of a second material. The first and second layers are disposed over one another such that a thermal coefficient of expansion of the cover layer is adapted to a thermal coefficient of expansion of the measuring structure.
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