Invention Grant
- Patent Title: Spectrum inspecting apparatus
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Application No.: US15858274Application Date: 2017-12-29
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Publication No.: US10663393B2Publication Date: 2020-05-26
- Inventor: Haihui Liu , Hongqiu Wang , Yumin Yi , Jianhong Zhang , Ankai Wang
- Applicant: Nuctech Company Limited
- Applicant Address: CN Beijing
- Assignee: Nuctech Company Limited
- Current Assignee: Nuctech Company Limited
- Current Assignee Address: CN Beijing
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@417a9de4
- Main IPC: G01N21/25
- IPC: G01N21/25 ; G01N21/39 ; G01N21/65 ; G01N21/47 ; G01N21/31

Abstract:
An embodiment of the present disclosure provides a spectrum inspecting apparatus. The apparatus includes a laser source; a focusing cylindrical lens configured to converge a light beam onto a sample; a light beam collecting device configured to collect a light beam signal, which is excited by the light beam, from the sample, so as to form a strip-shaped light spot; a slit configured to receive the collected light beam and couple it to downstream of a light path; a collimating device; a dispersing device configured to disperse the collected light beam so as to form a plurality of sub-beams having different wavelengths; an imaging device configured to image the sub-beams on the photon detector array respectively, wherein the light beam emitted from the laser source has a rectangular cross-section, the strip-shaped light spot impinges on the slit and its length is smaller than a length of the slit.
Public/Granted literature
- US20180188158A1 SPECTRUM INSPECTING APPARATUS Public/Granted day:2018-07-05
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