Invention Grant
- Patent Title: Analysis device
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Application No.: US16098194Application Date: 2016-06-27
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Publication No.: US10663415B2Publication Date: 2020-05-26
- Inventor: Tetsuya Yoneda
- Applicant: Shimadzu Corporation
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Maier & Maier, PLLC
- International Application: PCT/JP2016/068949 WO 20160627
- International Announcement: WO2018/002979 WO 20180104
- Main IPC: G01N23/223
- IPC: G01N23/223 ; G01N23/2204

Abstract:
An analyzer capable of having a pressure value converge to a set vacuum value P in a short time is provided. An analyzer includes a sample chamber in which a sample is placed, an analysis chamber including an X-ray tube and a detector, a gate valve switching between a connecting state where the inside of the sample chamber and the inside of the analysis chamber are connected together and a disconnecting state where the insides of the chambers and are disconnected from each other, a vacuum pump and a pressure regulatory valve connected to the inside of the sample chamber and the inside of the analysis chamber, and a control unit controlling the degree of opening of the pressure regulatory valve to set the internal pressure of the sample chamber and the internal pressure of the analysis chamber at respective set pressure values in the connecting state.
Public/Granted literature
- US20190145918A1 ANALYSIS DEVICE Public/Granted day:2019-05-16
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