Invention Grant
- Patent Title: Physical quantity sensor, electronic apparatus, and vehicle
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Application No.: US15910419Application Date: 2018-03-02
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Publication No.: US10663480B2Publication Date: 2020-05-26
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@34ed040
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01C21/10 ; G01C21/00 ; G01P15/18 ; G01P15/08

Abstract:
A physical quantity sensor includes: a movable body; a support that supports the movable body via a coupler; a substrate that is disposed so as to overlap the movable body in a plan view and is provided with a first fixed electrode and a second fixed electrode thereon along a first direction orthogonal to a longitudinal direction of the coupler; a third fixed electrode that does not overlap the movable body in the plan view, is electrically connected with any one of the first fixed electrode and the second fixed electrode, and is provided on the substrate; and a first dummy electrode that is disposed next to the third fixed electrode in the plan view, is at the same potential as the movable body, and is provided on the substrate.
Public/Granted literature
- US20180275162A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2018-09-27
Information query
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