Invention Grant
- Patent Title: Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same
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Application No.: US15893173Application Date: 2018-02-09
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Publication No.: US10663491B2Publication Date: 2020-05-26
- Inventor: Zheng John Ye , Jay D. Pinson, II , Juan Carlos Rocha , Abdul Aziz Khaja
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C16/50 ; H01J37/32 ; G01R15/14 ; G01R15/18 ; C23F4/00 ; C23C16/505 ; G01R15/16 ; H01L21/67
Abstract:
A voltage-current sensor enables more accurate measurement of the voltage, current, and phase of RF power that is delivered to high-temperature processing region. The sensor includes a planar body comprised of a non-organic, electrically insulative material, a measurement opening formed in the planar body, a voltage pickup disposed around the measurement opening, and a current pickup disposed around the measurement opening. Because of the planar configuration and material composition of the sensor, the sensor can be disposed proximate to or in contact with a high-temperature surface of a plasma processing chamber.
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Information query
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