Multiple core analysis mode for defect analysis
Abstract:
Related semiconductor devices have a problem in which analysis processing with high defect reproducibility cannot be performed. According to an embodiment, a semiconductor device includes a first arithmetic core that executes a first program stored in a first code area using a first local memory area and a second arithmetic core that executes a second program stored in a second code area using a second local memory area. In an analysis mode, the semiconductor device performs first analysis processing that causes both the first arithmetic core and the second arithmetic core to execute the first program and second analysis processing that causes both the first arithmetic core and the second arithmetic core to execute the second program, and compares a plurality of arithmetic result data pieces acquired from the first and second analysis processing to thereby acquire analysis information used for defect analysis.
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