Invention Grant
- Patent Title: Manufacturing method for electrostatically tunable magnetoelectric inductors with large inductance tunability
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Application No.: US15603816Application Date: 2017-05-24
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Publication No.: US10665383B2Publication Date: 2020-05-26
- Inventor: Nian-Xiang Sun
- Applicant: Winchester Technologies, LLC.
- Applicant Address: US MA Winchester
- Assignee: Winchester Technologies, LLC.
- Current Assignee: Winchester Technologies, LLC.
- Current Assignee Address: US MA Winchester
- Agency: Foley & Lardner LLP
- Main IPC: H01F29/14
- IPC: H01F29/14 ; H01F41/04 ; H01F41/34 ; H01F21/08 ; H01F27/28 ; H01F41/14 ; H01F41/32 ; H01F10/26

Abstract:
A method of manufacturing an electrostatically tunable magnetoelectric inductor, the method includes forming a piezoelectric layer on a substrate. The method further includes forming a magnetoelectric structure over the piezoelectric layer by: forming a first electrically conductive layer disposed above the piezoelectric layer; forming an isolation layer configured to translate changes in strain; forming a magnetic film layer disposed over the isolation layer; and forming a second electrically conductive layer, disposed over the magnetic film layer and wherein the second electrically conductive layer is in electrical communication with the first electrically conductive layer so as to form at least one electrically conductive coil around the magnetic film layer.
Public/Granted literature
- US20180075966A1 ELECTROSTATICALLY TUNABLE MAGNETOELECTRIC INDUCTORS WITH LARGE INDUCTANCE TUNABILITY Public/Granted day:2018-03-15
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