Invention Grant
- Patent Title: Semiconductor device with multiple threshold voltages
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Application No.: US16139244Application Date: 2018-09-24
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Publication No.: US10665461B2Publication Date: 2020-05-26
- Inventor: Praveen Joseph , Indira Seshadri , Ekmini Anuja De Silva
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/78 ; H01L21/308 ; H01L27/088 ; H01L21/033 ; H01L29/49

Abstract:
A method for fabricating a semiconductor device with multiple threshold voltages includes masking a substrate structure to selectively form work-function metal layers on vertical field effect transistors. In the method, a first work function metal layer is formed on a high-k dielectric layer of a substrate structure comprising vertical field effect transistors. The first work function metal layer and the high-k dielectric layer are etched to form gate regions for each vertical field effect transistor. A resist mask is formed over a first of the vertical field effect transistors. The resist mask isolates the first of the vertical field effect transistors from a second of the vertical field effect transistors. A second work function metal layer is selectively formed on the first work function metal layer of the gate region of the second of the vertical field effect transistors. The resist mask is then removed.
Public/Granted literature
- US20200098569A1 SEMICONDUCTOR DEVICE WITH MULTIPLE THRESHOLD VOLTAGES Public/Granted day:2020-03-26
Information query
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