Invention Grant
- Patent Title: Substrate treatment device and substrate treatment method
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Application No.: US16062661Application Date: 2017-01-23
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Publication No.: US10665479B2Publication Date: 2020-05-26
- Inventor: Akio Hashizume
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4e453fdd
- International Application: PCT/JP2017/002107 WO 20170123
- International Announcement: WO2017/130897 WO 20170803
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05B15/70 ; B05B1/32 ; H01L21/02 ; H01L21/306

Abstract:
A substrate processing apparatus includes a rotating unit rotating a substrate around a predetermined first rotational axis passing through a central portion of a major surface of the substrate, a nozzle provided to be circumrotatable around a predetermined second rotational axis, discharging a processing fluid toward the major surface of the substrate, and having a plurality of discharge ports disposed at positions separated from the second rotational axis, a processing fluid supplying unit supplying the processing fluid to the plurality of discharge ports, and a nozzle moving unit moving the nozzle between a central portion processing position and a peripheral edge portion.
Public/Granted literature
- US20180366350A1 SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD Public/Granted day:2018-12-20
Information query
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