- Patent Title: Plate-shaped workpiece processing method including first and second cutting steps, where the second step includes use of a cutting fluid containing an organic acid and an oxidizing agent
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Application No.: US15940468Application Date: 2018-03-29
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Publication No.: US10665482B2Publication Date: 2020-05-26
- Inventor: Kenji Takenouchi
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@192d1d6a
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/78 ; H01L21/304 ; H01L21/683 ; H01L21/687

Abstract:
A method for processing a plate-shaped workpiece having a division line and a metal member formed on the division line or in an area corresponding to the division line includes a holding step of holding the workpiece on a chuck table with the metal member oriented downward, a first cutting step of cutting the workpiece along the division line by using a first cutting blade, thereby forming a first cut groove having a bottom not reaching the metal member, and a second cutting step of cutting the workpiece along the first cut groove by using a second cutting blade, thereby forming a second cut groove fully cutting the workpiece along the division line so as to divide the metal member. The second cutting step includes supplying a cutting fluid containing an organic acid and an oxidizing agent to the workpiece.
Public/Granted literature
- US20180286709A1 PLATE-SHAPED WORKPIECE PROCESSING METHOD Public/Granted day:2018-10-04
Information query
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