Invention Grant
- Patent Title: Load port apparatus and method of driving the same
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Application No.: US16142652Application Date: 2018-09-26
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Publication No.: US10665488B2Publication Date: 2020-05-26
- Inventor: Tadamasa Iwamoto , Hiroshi Igarashi
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@58e869f0
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A load port apparatus connects a main opening of a wafer transportation container with a frame opening. The load port apparatus includes an installation part, a frame, and a flange clamp. The installation part has an installation table configured to install the wafer transportation container and move to and from the frame opening. The frame is upright from the installation part and has the frame opening. The flange clamp includes an engagement portion and a drive portion. The engagement portion is configured to be engaged with a flange surrounding an outer circumference of the main opening. The drive portion is configured to drive the engagement portion. The engagement portion is engaged from above or the side with a flange groove formed in the flange and opening radially outwardly.
Public/Granted literature
- US20190096728A1 LOAD PORT APPARATUS AND METHOD OF DRIVING THE SAME Public/Granted day:2019-03-28
Information query
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