Invention Grant
- Patent Title: 3D IC Decoupling capacitor structure and method for manufacturing the same
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Application No.: US16567840Application Date: 2019-09-11
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Publication No.: US10665536B2Publication Date: 2020-05-26
- Inventor: Wen-Shiang Liao , Chewn-Pu Jou
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/31 ; H01L23/00 ; H01L21/56

Abstract:
A semiconductor structure is disclosed. The semiconductor structure includes: a polymer base layer; a backside redistribution layer (RDL) over the polymer base layer; a molding layer over the backside RDL; a polymer layer over the molding layer; a front side RDL over the polymer layer; and a metal-insulator-metal (MIM) capacitor vertically passing through the molding layer, the MIM capacitor including a first electrode, an insulation layer and a second electrode, wherein the insulation layer surrounds the first electrode, and the second electrode surrounds the insulation layer, and the molding layer surrounds the second electrode. An associated method for manufacturing a semiconductor structure is also disclosed.
Public/Granted literature
- US20200006218A1 3D IC DECOUPLING CAPACITOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-01-02
Information query
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