Invention Grant
- Patent Title: Trench MOSFET device and the preparation method thereof
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Application No.: US16015091Application Date: 2018-06-21
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Publication No.: US10665551B2Publication Date: 2020-05-26
- Inventor: Xiaobin Wang , Madhur Bobde , Paul Thorup
- Applicant: Alpha and Omega Semiconductor (Cayman) Ltd.
- Applicant Address: KY Grand Cayman
- Assignee: ALPHA AND OMEGA SEMICONDUCTOR (CAYMAN) LTD.
- Current Assignee: ALPHA AND OMEGA SEMICONDUCTOR (CAYMAN) LTD.
- Current Assignee Address: KY Grand Cayman
- Agent Chen-Chi Lin
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/00 ; H01L21/265 ; H01L29/06 ; H01L29/10 ; H01L29/66 ; H01L29/78

Abstract:
A trench-type metal-oxide-semiconductor field-effect transistor (MOSFET) device and a fabrication method are disclosed. A semiconductor substrate of a first conductivity type is provided. A plurality of first trenches arranged side by side in a first stripe layout extending along a first direction in a first preset area of the semiconductor substrate are formed. A plurality of second trenches arranged side by side in a second stripe layout extending along a second direction perpendicular to the first direction in a second preset area of the semiconductor substrate are formed. The plurality of first trenches and the plurality of second trenches are filled with a conductive material so as to form a plurality of control gates.
Public/Granted literature
- US20180323155A1 TRENCH MOSFET DEVICE AND THE PREPARATION METHOD THEREOF Public/Granted day:2018-11-08
Information query
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