Invention Grant
- Patent Title: Integrated circuit device and method of fabricating the same
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Application No.: US15808865Application Date: 2017-11-09
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Publication No.: US10665588B2Publication Date: 2020-05-26
- Inventor: Hwi-chan Jun , Heon-jong Shin , In-chan Hwang , Jae-ran Jang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@36695f17
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/768 ; H01L21/265 ; H01L27/088 ; H01L29/08 ; H01L29/417 ; H01L29/06 ; H01L21/8234 ; H01L27/02 ; H01L21/762 ; H01L21/761 ; H01L23/528 ; H01L29/78

Abstract:
An integrated circuit device is provided as follows. A fin-type active region extends on a substrate in a first horizontal direction. A gate line extends on the fin-type active region in a second horizontal direction intersecting the first horizontal direction. A source/drain region is disposed in the fin-type active region at one side of the gate line. An insulating cover extends parallel to the substrate, with the gate line and the source/drain region arranged between the insulating cover and the substrate. A source/drain contact that vertically extends through the insulating cover has a first sidewall covered with the insulating cover and an end connected to the source/drain region. A fin isolation insulating unit vertically extends through the insulating cover into the fin-type active region. The source/drain region is arranged between the fin isolation insulating unit and the gate line.
Public/Granted literature
- US20180261596A1 INTEGRATED CIRCUIT DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2018-09-13
Information query
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