Invention Grant
- Patent Title: Semiconductor structure and manufacturing method of the same
-
Application No.: US16034825Application Date: 2018-07-13
-
Publication No.: US10665727B2Publication Date: 2020-05-26
- Inventor: Wen-Shun Lo , Felix Ying-Kit Tsui
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L29/872
- IPC: H01L29/872 ; H01L21/265 ; H01L21/266 ; H01L27/06 ; H01L29/08 ; H01L29/06 ; H01L29/66 ; H01L29/78

Abstract:
Present disclosure provides a semiconductor structure, including a semiconductor substrate having a top surface, a first well region of a first conductivity type in the semiconductor substrate, a second well region of a second conductivity type in the semiconductor substrate, laterally surrounding the first well region, and an isolation region in the first well region and the second well region in proximity to the top surface. The first well region includes a first lighter doped region in proximity to the top surface, and a heavier doped region under the first lighter doped region. Present disclosure also provides a method for manufacturing the semiconductor structure described herein.
Public/Granted literature
- US20200020813A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2020-01-16
Information query
IPC分类: