Invention Grant
- Patent Title: Method for producing organic electroluminescent device and film deposition apparatus
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Application No.: US16689502Application Date: 2019-11-20
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Publication No.: US10665817B2Publication Date: 2020-05-26
- Inventor: Katsuhiko Kishimoto
- Applicant: Sakai Display Products Corporation
- Applicant Address: JP Osaka
- Assignee: Sakai Display Products Corporation
- Current Assignee: Sakai Display Products Corporation
- Current Assignee Address: JP Osaka
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Main IPC: H01L51/52
- IPC: H01L51/52 ; H01L51/00 ; H01L51/56 ; C23C16/48

Abstract:
A method for producing an organic EL device in this disclosure includes the steps of providing an element substrate including a substrate and a plurality of organic EL devices arranged on the substrate; and forming a thin film encapsulation structure over the element substrate. The step of forming the thin film encapsulation structure includes the steps of forming a first inorganic barrier layer over the element substrate; condensing a photocurable resin on the first inorganic barrier layer; irradiating a plurality of selected regions of the photocurable resin with a laser beam to cure at least a part of the photocurable resin, thus to form a photocurable resin layer; removing an uncured part of the photocurable resin; and forming a second inorganic barrier layer, covering the photocurable resin layer, on the first inorganic barrier layer.
Public/Granted literature
- US20200136090A1 METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT DEVICE AND FILM DEPOSITION APPARATUS Public/Granted day:2020-04-30
Information query
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