Invention Grant
- Patent Title: Multiple-output radiofrequency matching module and associated methods
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Application No.: US15961028Application Date: 2018-04-24
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Publication No.: US10666218B2Publication Date: 2020-05-26
- Inventor: Karl Leeser , Sunil Kapoor , Bradford J. Lyndaker
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H03H7/38
- IPC: H03H7/38 ; H01J37/32

Abstract:
A matching module includes an input terminal connected to an input node, a variable load capacitor, and a plurality of RF signal delivery branches. The input terminal is connected to receive RF signals from one or more RF generators. The load capacitor is connected between the input node and a reference ground potential. Each of the plurality of RF signal delivery branches has a respective ingress terminal connected to the input node and a respective egress terminal connected to a respective one of a plurality of output terminals. Each of the plurality of output terminals of the matching module is connected to deliver RF signals to a different one of a plurality of plasma processing stations/chambers. Each of the plurality of RF signal delivery branches includes a corresponding inductor and a corresponding variable tuning capacitor electrically connected in a serial manner between its ingress terminal and its egress terminal.
Public/Granted literature
- US20180309424A1 Multiple-Output Radiofrequency Matching Module and Associated Methods Public/Granted day:2018-10-25
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