Invention Grant
- Patent Title: Connections between laminated heater and heater voltage inputs
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Application No.: US15586203Application Date: 2017-05-03
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Publication No.: US10667379B2Publication Date: 2020-05-26
- Inventor: Yuma Ohkura , Darrell Ehrlich , Eric A. Pape
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H05B3/03
- IPC: H05B3/03 ; H05B3/06 ; H05B3/28 ; H05K1/11 ; H05K3/10 ; H05K1/02 ; H05K1/03 ; H05B3/26 ; H01L21/683 ; H01L21/67

Abstract:
A substrate support for a substrate processing system includes a plurality of heating zones, a baseplate, a heating layer arranged on the baseplate, a ceramic layer arranged on the heating layer, and wiring provided through the baseplate, the heating layer, and into the ceramic layer in a first zone of the plurality of heating zones. An electrical connection is routed from the wiring in the first zone, across the ceramic layer to a second zone of the plurality of heating zones, and to a heating element in the heating layer in the second zone.
Public/Granted literature
- US20170332481A1 CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS Public/Granted day:2017-11-16
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