Invention Grant
- Patent Title: Optical waveguide having aluminum nitride thin film
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Application No.: US16673719Application Date: 2019-11-04
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Publication No.: US10667388B2Publication Date: 2020-05-26
- Inventor: Henry Meyer Daghighian , Steven C. Bird
- Applicant: FINISAR CORPORATION
- Applicant Address: US DE Wilmington
- Assignee: II-VI Delaware Inc.
- Current Assignee: II-VI Delaware Inc.
- Current Assignee Address: US DE Wilmington
- Agency: Maschoff Brennan
- Main IPC: H05K1/02
- IPC: H05K1/02 ; H05K1/03 ; H05K1/11 ; G02B6/132 ; G02B6/124 ; G02B6/122 ; G02B6/12 ; G02B6/42 ; H05K3/46 ; G02B6/136 ; H01P3/08 ; H05K1/09 ; H05K3/32
Abstract:
An optical waveguide is disclosed. In a disclosed embodiment, the optical waveguide includes a first aluminum nitride (AlN) thin film disposed on a layer of high-frequency polymer. A second AlN thin film is embedded in the first AlN thin film. In disclosed embodiments, the nitrogen concentration level of the first AlN thin film is different than the concentration level of the second AlN thin film.
Public/Granted literature
- US20200068706A1 OPTICAL WAVEGUIDE HAVING ALUMINUM NITRIDE THIN FILM Public/Granted day:2020-02-27
Information query
