Invention Grant
- Patent Title: Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
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Application No.: US16262075Application Date: 2019-01-30
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Publication No.: US10668724B2Publication Date: 2020-06-02
- Inventor: Motoki Takabe
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@600bec6b
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/08 ; B41J2/16

Abstract:
A piezoelectric device includes an active portion of a piezoelectric layer interposed between a first electrode and a second electrode is provided independently for each of a first recessed portions, the first electrode forms an individual electrode provided independently for each of the active portions, the second electrode forms a common electrode commonly provided to a plurality of the active portions, in the piezoelectric layer, a second recessed portion which is provided outside the active portion and opens on a side opposite to a substrate is provided, and in a lamination direction of the substrate and the piezoelectric element, a vibration plate has a nitride film as an uppermost layer on the second electrode side at least in a region overlapping a bottom surface of the second recessed portion.
Public/Granted literature
- US20190232657A1 Piezoelectric Device, Liquid Ejecting Head, And Liquid Ejecting Apparatus Public/Granted day:2019-08-01
Information query
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