Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
Abstract:
A piezoelectric device includes an active portion of a piezoelectric layer interposed between a first electrode and a second electrode is provided independently for each of a first recessed portions, the first electrode forms an individual electrode provided independently for each of the active portions, the second electrode forms a common electrode commonly provided to a plurality of the active portions, in the piezoelectric layer, a second recessed portion which is provided outside the active portion and opens on a side opposite to a substrate is provided, and in a lamination direction of the substrate and the piezoelectric element, a vibration plate has a nitride film as an uppermost layer on the second electrode side at least in a region overlapping a bottom surface of the second recessed portion.
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