Invention Grant
- Patent Title: Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
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Application No.: US15966799Application Date: 2018-04-30
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Publication No.: US10669160B2Publication Date: 2020-06-02
- Inventor: Yumin Liu , Feng Li , Zhiwen Wan , Claudia Fafard , Stefan Wiese , Guillaume Husson , Grigory Nikiforov , Bin Sui , Jean-Marc Girard
- Applicant: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude , American Air Liquide, Inc.
- Applicant Address: FR Paris US CA Fremont
- Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude,American Air Liquide, Inc.
- Current Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude,American Air Liquide, Inc.
- Current Assignee Address: FR Paris US CA Fremont
- Agent Patricia E. McQueeney; Allen E. White
- Main IPC: C01G41/04
- IPC: C01G41/04
Abstract:
Synthesis of tungsten pentahalide compositions having low impurity profiles are disclosed. The specific impurity profile permits deposition of high purity tungsten-containing films using vapor deposition processes or other semiconductor manufacturing processes without introduction of performance-impacting contaminants.
Public/Granted literature
- US20190330076A1 HETEROGENEOUS WET SYNTHESIS PROCESS FOR PREPARATION OF HIGH PURITY TUNGSTEN PENTAHALIDE Public/Granted day:2019-10-31
Information query
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