Invention Grant
- Patent Title: Method for manufacturing semiconductor device including heating and pressuring a laminate having an adhesive layer
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Application No.: US15770792Application Date: 2016-10-26
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Publication No.: US10669454B2Publication Date: 2020-06-02
- Inventor: Kazutaka Honda , Koichi Chabana , Keishi Ono , Akira Nagai
- Applicant: HITACHI CHEMICAL COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3417929c com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4b1046ee com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@14a6840a
- International Application: PCT/JP2016/081774 WO 20161026
- International Announcement: WO2017/073630 WO 20170504
- Main IPC: H01L25/065
- IPC: H01L25/065 ; C09J163/00 ; C09J11/06 ; C09J201/00 ; H01L25/07 ; H01L25/18 ; H01L23/00 ; C09J11/04

Abstract:
Disclosed is a method for manufacturing a semiconductor device which includes: a semiconductor chip; a substrate and/or another semiconductor chip; and an adhesive layer interposed therebetween. This method comprises the steps of: heating and pressuring a laminate having: the semiconductor chip; the substrate; the another semiconductor chip or a semiconductor wafer; and the adhesive layer by interposing the laminate with pressing members for temporary press-bonding to thereby temporarily press-bond the substrate and the another semiconductor chip or the semiconductor wafer to the semiconductor chip; and heating and pressuring the laminate by interposing the laminate with pressing members for main press-bonding, which are separately prepared from the pressing members for temporary press-bonding, to thereby electrically connect a connection portion of the semiconductor chip and a connection portion of the substrate or the another semiconductor chip.
Public/Granted literature
- US20180312731A1 ADHESIVE FOR SEMICONDUCTOR, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SAID DEVICE Public/Granted day:2018-11-01
Information query
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