Invention Grant
- Patent Title: Vapor deposition apparatus, vapor deposition method and method of manufacturing organic EL display apparatus
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Application No.: US15757420Application Date: 2017-08-21
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Publication No.: US10669620B2Publication Date: 2020-06-02
- Inventor: Susumu Sakio , Katsuhiko Kishimoto
- Applicant: Sakai Display Products Corporation
- Applicant Address: JP Osaka
- Assignee: Sakai Display Products Corporation
- Current Assignee: Sakai Display Products Corporation
- Current Assignee Address: JP Osaka
- Agency: Snell & Wilmer L.L.P.
- International Application: PCT/JP2017/029814 WO 20170821
- International Announcement: WO2019/038811 WO 20190228
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00 ; H01L51/56 ; H05B33/10

Abstract:
A vapor deposition apparatus disclosed by an embodiment comprises: a vacuum chamber (8); a mask holder (15) for holding a deposition mask 1; a substrate holder (29) for holding a substrate for vapor deposition (2); an electromagnet (3) disposed above a surface; a vapor deposition source 5 for vaporizing or sublimating a vapor deposition material; and a heat pipe (7) including at least a heat absorption part (71) and a heat dissipation part (72), the heat absorption part being in contact with the electromagnet (3), and the heat dissipation part being derived to an outside of the vacuum chamber (8). The heat pipe (7) and the electromagnet (3) are in intimate contact with each other at an area of a contact part between the heat pipe (7) and the electromagnet (3), the area being equal to or more than a cross-sectional area within an inner perimeter of a coil (32).
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