Invention Grant
- Patent Title: Fixing apparatus and evaporation method
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Application No.: US15517796Application Date: 2016-02-19
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Publication No.: US10669623B2Publication Date: 2020-06-02
- Inventor: Xinwei Gao , Xinxin Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Dilworth & Barrese, LLP.
- Agent Michael J. Musella, Esq.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7d525dc5
- International Application: PCT/CN2016/074098 WO 20160219
- International Announcement: WO2017/036102 WO 20170309
- Main IPC: C23C14/50
- IPC: C23C14/50 ; C23C14/24 ; H01L21/687 ; C23C14/04

Abstract:
The present disclosure discloses a fixing apparatus for fixing a substrate to be processed below a bearing base during an evaporation process, the substrate to be processed includes a base substrate, a ferromagnetic material is formed on a front surface or a back surface of the base substrate, and a magnetic field generator is disposed on a back surface of the bearing base at a location corresponding to the ferromagnetic material; the magnetic field generator is configured to generate a magnetic field so that the ferromagnetic material and the magnetic field generator are approaching to each other under an effect of the magnetic field generated by the magnetic field generator to fix a front surface of the bearing base with the back surface of the base substrate. An evaporation method is further disclosed.
Public/Granted literature
- US20170327942A1 FIXING APPARATUS AND EVAPORATION METHOD Public/Granted day:2017-11-16
Information query
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