Invention Grant
- Patent Title: Sliding member and method for producing the same
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Application No.: US15715416Application Date: 2017-09-26
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Publication No.: US10669624B2Publication Date: 2020-06-02
- Inventor: Kazuyoshi Manabe , Noritsugu Umehara , Hiroyuki Kousaka , Kazuyuki Ichimura
- Applicant: Kazuyoshi Manabe , Noritsugu Umehara , Hiroyuki Kousaka , Kazuyuki Ichimura
- Applicant Address: JP Toyota-shi, Aichi-ken JP Nagoya-shi, Aichi
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- Current Assignee Address: JP Toyota-shi, Aichi-ken JP Nagoya-shi, Aichi
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1c465a3e
- Main IPC: C23C16/34
- IPC: C23C16/34 ; C23C14/54 ; C23C14/06 ; C10M177/00 ; C23C14/02 ; C23C14/00 ; C10M103/02 ; C10M141/06 ; C23C14/46

Abstract:
In an amorphous carbon film of a sliding member, provided that a number of nitrogen atoms each singly bonded to three carbon atoms is A, and a number of nitrogen atoms each singly and doubly bonded to two carbon atoms, respectively, is B, a value A/B of the amorphous carbon film obtained through X-ray photoelectron spectroscopy analysis is 10 to 18. The method includes irradiating the surface of the substrate with nitrogen ion beams and irradiating a carbon target with electron beams, thereby forming an amorphous carbon film on the surface of the substrate while vapor-depositing a part of the carbon target onto the surface of the substrate. The output of the electron beams that irradiate the carbon target is 30 to 50 W.
Public/Granted literature
- US20180087151A1 SLIDING MEMBER AND METHOD FOR PRODUCING THE SAME Public/Granted day:2018-03-29
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