Invention Grant
- Patent Title: Gas injection apparatus and thin film deposition equipment including the same
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Application No.: US16031349Application Date: 2018-07-10
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Publication No.: US10669631B2Publication Date: 2020-06-02
- Inventor: Ki-Chul Kim , Jung-Il Ahn , Jung-Hun Seo , Jong-Cheol Lee , Kyu-Hee Han , Seung-Han Lee , Jin-Pil Heo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7b49941c
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/455 ; C23C16/44

Abstract:
A gas injection apparatus, which can sequentially supply a substrate with at least two kinds of source gases reacting with each other in a container, and thin film deposition equipment including the gas injection apparatus, are provided. The gas injection apparatus includes a base plate, a first gas supply region protruding from the base plate, a second gas supply region protruding from the base plate and adjacent the first gas supply region, and a trench defined by a sidewall of the first gas supply region and a sidewall of the second gas supply region. The sidewall of the first gas supply region and the sidewall of the second gas supply region face each other and extend in a radial direction on the base plate.
Public/Granted literature
- US20180320267A1 GAS INJECTION APPARATUS AND THIN FILM DEPOSITION EQUIPMENT INCLUDING THE SAME Public/Granted day:2018-11-08
Information query
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