Invention Grant
- Patent Title: Methods and apparatuses for electroplating and seed layer detection
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Application No.: US16526919Application Date: 2019-07-30
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Publication No.: US10669644B2Publication Date: 2020-06-02
- Inventor: Daniel Mark Dinneen , Steven T. Mayer
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: G01N21/00
- IPC: G01N21/00 ; C25D17/16 ; H01L21/67 ; H01L21/66 ; C25D3/38 ; C25D7/12 ; C25D17/00 ; C25D21/12

Abstract:
Disclosed herein are methods for electroplating which employ seed layer detection. Such methods may operate by selecting a wafer, illuminating one or more points within an interior region of the wafer surface, measuring a first set of one or more in-process color signals from the one or more points within the interior region, illuminating one or more points within an edge region of the wafer surface, measuring a second set of one or more in-process color signals from the one or more points within the edge region, each color signal having one or more color components, calculating a metric indicative of a difference between the color signals in the first and second sets of in-process color signals, determining whether an acceptable seed layer is present on the wafer based on whether the metric is within a predetermined range, and repeating the foregoing for one or more additional wafers.
Public/Granted literature
- US20190352792A1 METHODS AND APPARATUSES FOR ELECTROPLATING AND SEED LAYER DETECTION Public/Granted day:2019-11-21
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