Invention Grant
- Patent Title: Capacitive pressure sensor
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Application No.: US15896139Application Date: 2018-02-14
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Publication No.: US10670481B2Publication Date: 2020-06-02
- Inventor: Takuya Ishihara , Masaru Soeda , Masashi Sekine
- Applicant: AZBIL CORPORATION
- Applicant Address: JP Chiyoda-ku
- Assignee: AZBILL CORPORATION
- Current Assignee: AZBILL CORPORATION
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2bff71ed
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L19/06 ; G01L13/02 ; G01M3/16 ; G01L19/04

Abstract:
A pressure introducing chamber is provided with a baffle plate which is positioned with one surface thereof facing in a direction orthogonal to a direction of travel of a measured medium introduced through a pressure introducing hole into the pressure introducing chamber. A first distance between a pressure receiving surface of a sensor diaphragm and an inner surface of the pressure introducing chamber facing the pressure receiving surface and a second distance between the pressure receiving surface of the sensor diaphragm and the other surface of the baffle plate facing the pressure receiving surface are both smaller than a mean free path of the measured medium in the entire region of the pressure receiving surface of the sensor diaphragm.
Public/Granted literature
- US20180238756A1 CAPACITIVE PRESSURE SENSOR Public/Granted day:2018-08-23
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