Invention Grant
- Patent Title: Particle detecting device and method for inspecting particle detecting device
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Application No.: US16301588Application Date: 2017-04-04
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Publication No.: US10670513B2Publication Date: 2020-06-02
- Inventor: Masashi Furuya , Daisuke Obara
- Applicant: Azbil Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Azbil Corporation
- Current Assignee: Azbil Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6afdc9c3
- International Application: PCT/JP2017/014129 WO 20170404
- International Announcement: WO2017/199615 WO 20171123
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N15/14 ; G01N21/64 ; G01N21/65
Abstract:
A particle detecting device includes an inspection light source 30, which emits inspection light, a flow cell 40, which is irradiated with the inspection light, and an oval mirror 50, which has a first focal point at a position of the flow cell 40 and has a hole 51 at an apex of the oval mirror 50.
Public/Granted literature
- US20190285538A1 PARTICLE DETECTING DEVICE AND METHOD FOR INSPECTING PARTICLE DETECTING DEVICE Public/Granted day:2019-09-19
Information query
