Invention Grant
- Patent Title: Nanostructured nickel oxide environmental sensor device and a package for encapsulating the device
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Application No.: US15780084Application Date: 2016-11-30
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Publication No.: US10670547B2Publication Date: 2020-06-02
- Inventor: Ashwin Samarao
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- International Application: PCT/EP2016/079267 WO 20161130
- International Announcement: WO2017/093311 WO 20170608
- Main IPC: G01N27/12
- IPC: G01N27/12
Abstract:
A nanostructured environmental sensor includes a silicon based substrate, a structural base located above the substrate, and a sensor portion suspended above the structural base. A top surface of the sensor portion is formed from nickel oxide using atomic layer deposition. The nanostructured thin film nickel oxide environmental sensor is provided in a housing to form an environmental sensor package for sensing attributes of the environment to which the environmental sensor package is exposed.
Public/Granted literature
- US20180356357A1 Nanostructured Nickel Oxide Environmental Sensor Device and a Package for Encapsulating the Device Public/Granted day:2018-12-13
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