Invention Grant
- Patent Title: Reconfigurable gas sensor architecture with a high sensitivity at low temperatures
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Application No.: US14798099Application Date: 2015-07-13
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Publication No.: US10670554B2Publication Date: 2020-06-02
- Inventor: S. J. Chey , Hendrik F. Hamann , Levente Klein , Siyuan Lu , Roland Nagy
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: G01N30/96
- IPC: G01N30/96 ; G01N7/00 ; G01N27/414 ; G01N33/00 ; G01N27/12 ; C23C14/08 ; C23C14/14 ; C23C14/30 ; C23C14/34 ; G08B21/16 ; G08B29/18 ; G08B29/22
Abstract:
A gas sensing device includes a dielectric substrate, a heater integrated into a first side of the substrate and an insulating dielectric formed over the heater. A gas sensing layer is formed on a second side of the substrate opposite the first side. Contacts are formed on the gas sensing substrate. A noble material is formed on a portion of the gas sensing layer between the contacts to act as an ionizing catalyst such that, upon heating to a temperature, adsorption of a specific gas changes electronic properties of the gas sensing layer to permit detection of the gas.
Public/Granted literature
- US20170016866A1 RECONFIGURABLE GAS SENSOR ARCHITECTURE WITH A HIGH SENSITIVITY AT LOW TEMPERATURES Public/Granted day:2017-01-19
Information query
