Invention Grant
- Patent Title: Reverse pattern formation composition, reverse pattern formation method, and device formation method
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Application No.: US16314716Application Date: 2017-07-03
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Publication No.: US10670969B2Publication Date: 2020-06-02
- Inventor: Xiaowei Wang , Tatsuro Nagahara
- Applicant: Merck Patent GmbH
- Applicant Address: LU
- Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee Address: LU
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@322812c9
- International Application: PCT/EP2017/066408 WO 20170703
- International Announcement: WO2018/007273 WO 20180111
- Main IPC: G03F7/36
- IPC: G03F7/36 ; G03F7/075 ; G03F7/40 ; C09D183/04 ; G03F7/16

Abstract:
[Problem] To provide a composition, which is a reverse pattern formation composition comprising an aqueous solvent having little influence on a resist pattern, and which is excellent in flatness and filling properties after coating and has excellent etching resistance. Furthermore, a method for forming a pattern using the same is provided. [Means for Solution] A reverse pattern formation composition comprising a polysiloxane compound comprising a repeating unit having a nitrogen-containing group and a solvent comprising water, and a method for forming a fine pattern using the same.
Public/Granted literature
- US20190204747A1 REVERSE PATTERN FORMATION COMPOSITION, REVERSE PATTERN FORMATION METHOD, AND DEVICE FORMATION METHOD Public/Granted day:2019-07-04
Information query
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