Invention Grant
- Patent Title: Plasma processing apparatus and control method
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Application No.: US16597193Application Date: 2019-10-09
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Publication No.: US10672589B2Publication Date: 2020-06-02
- Inventor: Chishio Koshimizu , Shin Hirotsu
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@11d180a2 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@276c17a9
- Main IPC: H05B31/36
- IPC: H05B31/36 ; H01J7/24 ; H01J37/32 ; H01J37/16 ; H01J37/04 ; H01J37/24

Abstract:
A plasma processing apparatus includes: a processing container; an electrode that places a workpiece thereon; a plasma generation source that supplies plasma into the processing container; a bias power supply that supplies a bias power to the electrode; an edge ring disposed at a periphery of the workpiece; a DC power supply that supplies a DC voltage to the edge ring; a controller that executes a first control procedure in which the DC voltage periodically repeats a first state having a first voltage value and a second state having a second voltage value, the first voltage value is supplied in a partial time period within each period of a potential of the electrode, and the second voltage value is supplied such that the first and second states are continuous.
Public/Granted literature
- US20200118794A1 PLASMA PROCESSING APPARATUS AND CONTROL METHOD Public/Granted day:2020-04-16
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