Invention Grant
- Patent Title: Frequency tuning for a matchless plasma source
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Application No.: US15921266Application Date: 2018-03-14
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Publication No.: US10672590B2Publication Date: 2020-06-02
- Inventor: Maolin Long , Yuhou Wang , Ying Wu , Alex Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Frequency tuning for a matchless plasma source is described. To perform the frequency tuning, current is measured at an output of an amplification circuit of the matchless plasma source after a change in a frequency of operation of the matchless plasma source. Upon determining that the current has increased with the change in the frequency of operation, the frequency of operation is further changed until the current has decreased. When the current has decreased, the changed frequency of operation is further modified to be an operational frequency. When the matchless plasma source operates at the operational frequency, the current at the output of the amplification circuit is maximized.
Public/Granted literature
- US20190287764A1 Frequency Tuning for a Matchless Plasma Source Public/Granted day:2019-09-19
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