Invention Grant
- Patent Title: Internal purge diffuser with offset manifold
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Application No.: US15755357Application Date: 2016-09-02
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Publication No.: US10672637B2Publication Date: 2020-06-02
- Inventor: Kyle Glavan , Jeffery J. King , Matthew Fuller
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- International Application: PCT/US2016/050085 WO 20160902
- International Announcement: WO2017/040913 WO 20170309
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A purge tower assembly for a substrate container. The assembly may include a purge interface body, including a base portion and a top portion, for mounting to a bottom plate of a substrate container. The base portion may include a substantially tubular base sidewall and the top portion may have a top sidewall positioned on the top edge of the base portion. The top portion may include an inlet nozzle for mounting through a rearward inlet in the bottom plate. The inlet nozzle may have a substantially tubular sidewall extending upwardly from the top sidewall and defining an interior of the inlet nozzle. The base portion and the top sidewall may define an offset conduit portion disposed connected to the base portion and the inlet nozzle, the base portion and the inlet nozzle in fluid communication via the offset conduit portion.
Public/Granted literature
- US20180247849A1 INTERNAL PURGE DIFFUSER WITH OFFSET MANIFOLD Public/Granted day:2018-08-30
Information query
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