Invention Grant
- Patent Title: Method for automatic sending cassette pod
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Application No.: US15599798Application Date: 2017-05-19
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Publication No.: US10672639B2Publication Date: 2020-06-02
- Inventor: Tsung-Sheng Kuo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B66C1/62

Abstract:
A system for sending a cassette pod is provided. The system includes a processing machine having a load port for receiving the cassette pod. The system further includes a manipulating apparatus positioned above the processing machine. The manipulating apparatus includes an intermediate module having a stage and a driving mechanism connected to the stage to change the position of the stage. The manipulating apparatus further includes a conveyor module having a gripper assembly for grasping the cassette pod.
Public/Granted literature
- US20180158708A1 METHOD FOR AUTOMATIC SENDING CASSETTE POD Public/Granted day:2018-06-07
Information query
IPC分类: