Invention Grant
- Patent Title: Through-package-via (TPV) structures on inorganic interposer and methods for fabricating same
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Application No.: US15005275Application Date: 2016-01-25
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Publication No.: US10672718B2Publication Date: 2020-06-02
- Inventor: Venkatesh Sundaram , Fuhan Liu , Rao R. Tummala , Vijay Sukumaran , Vivek Sridharan , Qiao Chen
- Applicant: GEORGIA TECH RESEARCH CORPORATION
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Troutman Sanders LLP
- Agent Ryan A. Schneider
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L23/00 ; H01L23/15 ; H01L23/498 ; H01L21/768 ; H01L23/48 ; H01L23/31

Abstract:
Disclosed herein are, for instance, methods for producing through package vias in a glass interposer. For instance, disclosed herein is a method for producing through package vias in a glass interposer comprising laminating a polymer on at least a portion of a top surface of a glass interposer, removing at least a portion of the polymer and the glass interposer to form a through via, filling at least a portion of the through via with a metal conductor to form a metallization layer, and selectively removing a portion of the metallization layer to form a metalized through package via. Other methods are also disclosed, along with through-package-via structures in glass interposers produced therefrom.
Public/Granted literature
- US20160141257A1 THROUGH-PACKAGE-VIA (TPV) STRUCTURES ON INORGANIC INTERPOSER AND METHODS FOR FABRICATING SAME Public/Granted day:2016-05-19
Information query
IPC分类: